TY - BOOK
AU - Symposium on Plasma Processing 7 1988 Atlanta, Ga
AU - Mathad, G. S.
AU - Schwartz, G. C.
AU - Hess, Dennis W.
TI - Proceedings of the Seventh Symposium on Plasma Processing [held in Atlanta, Ga., May 15 - 20, 1988]
PB - Electrochemical Society
KW - Plasma engineering Congresses
KW - Plasma engineering
KW - Congresses
KW - Konferenzschrift
PY - 1988
N2 - Spine title: Plasma processing
N2 - Includes bibliographies and indexes
BT - Proceedings / Electrochemical Society ; 88,22 ; Dielectrics and insulation and electronics divisions
CY - Pennington, NJ
UR - http://slubdd.de/katalog?TN_libero_mab2
ER -
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