TY - BOOK
AU - Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films 2 1986 San Diego, Calif
AU - Kapoor, Vik J.
AU - Hankins, Kevin T.
TI - Proceedings of the Symposium Silicon Nitride and Silicon Dioxide Thin Insulating Films [held October 20 - 24, 1986, in San Diego, Calif.]
PB - Electrochemical Society
KW - Thin film devices Congresses
KW - Thin film devices
KW - Congresses
KW - Silicon nitride
KW - Silicon dioxide
KW - Electric insulators and insulation
KW - Thin films
KW - Konferenzschrift
PY - 1987
N2 - Spine title: Silicon nitride and silicon dioxide thin insulating films
N2 - Includes bibliographies and indexes
BT - Proceedings / Electrochemical Society ; 87,10 ; Dielectrics and insulation and electronics divisions
CY - Pennington, NJ
UR - http://slubdd.de/katalog?TN_libero_mab2
ER -
Download citation