TY - BOOK
AU - International Conference on Ion Implantation in Semiconductors 1977 Reinhardsbrunn
AU - Hohmuth, Karl
TI - Proceedings / International Conference on Ion Implantation in Semiconductors. Mezdunarodnaja Konferencija poIonnoj Implantacii v Poluprovodnikach. Reinhardsbrunn 23-29 Oct. 1977 = Sbornik dokladov
PB - Zentralinst.f. Kernforschung
KW - Konferenzschrift
PY - 19XX-
BT - Zentralinstitut f. Kernforschung Rossendorf ; 360
CY - Dresden
UR - http://slubdd.de/katalog?TN_libero_mab2
ER -
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