TY - BOOK
AU - Bullis, W. Murray
TI - Methods of measurement for semiconductor materials, process control and devices quarterly report; July 1 to Sept. 30, 1971
PB - National Bureau of Standards
PY - 1972
BT - National Bureau of Standards technical note ; 717
CY - Washington
UR - http://slubdd.de/katalog?TN_libero_mab2
ER -
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