TY - BOOK
AU - International Symposium on Electrochemical Microfabrication 1 1991 Phoenix, Ariz
AU - Electrochemical Society Electrodeposition Division
AU - Datta, Madhav
AU - Sheppard, Keith
AU - Snyder, Dexter D.
TI - Proceedings of the First International Symposium on Electrochemical Microfabrication [... held October 14 - 16 in Phoenix, Arizona ...]
PB - Electrochemical Society
SN - 1566770025
KW - Microelectronics
KW - Congresses
KW - Electrochemistry, Industrial
KW - Masks (Electronics)
KW - Silicon
KW - Microfabrication
KW - Konferenzschrift
PY - 1992
N2 - Includes bibliographical references and indexes
BT - Proceedings / Electrochemical Society ; 92,3 ; Electrodeposition division
CY - Pennington, N.J.
UR - http://slubdd.de/katalog?TN_libero_mab2
ER -
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