TY - BOOK
AU - Electrochemical Society Dielectric Science and Technology Division
AU - Electrochemical Society Electronics Division
AU - Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films 3 1994 San Francisco, Calif
AU - Kapoor, Vik J.
AU - Brown, William D.
TI - Proceedings of the Third Symposium on Silicon Nitride and Silicon Dioxide thin Insulating Films [held May 23 - 27, 1994 in San Francisco, California]
PB - Electrochemical Society
SN - 1566770483
KW - Thin film devices
KW - Congresses
KW - Silicon nitride
KW - Silicon dioxide
KW - Electric insulators and insulation
KW - Thin films
KW - Konferenzschrift
KW - Siliciumnitrid
KW - Siliciumdioxid
KW - Dünne Schicht
PY - 1994
N2 - Includes bibliographies and indexes
BT - Proceedings / Electrochemical Society ; 94,16 ; Dielectric science and technology and electronics division
CY - Pennington, NJ
UR - http://slubdd.de/katalog?TN_libero_mab2
ER -
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