TY -
BOOK
AU - Suntola, Tuomo
TI -
Atomic layer epitaxy
ET - 1. publ.
PB - Chapman and Hall
PB - : Blackie [u.a.]
SN - 0216925746
SN - 0412020114
KW - Semiconductor devices. Atomic layer epitaxy
KW - Atomschichtepitaxie
PY - 1990
PY - , 1990
CY - New York
CY - ; Glasgow [u.a.]
UR - http://slubdd.de/katalog?TN_libero_mab2
ER -