TY -
GEN
AU - Dittmann, Kristian
TI -
Detailed investigations of the sheath dynamics and elementary processes in capacitively coupled RF plasmas
KW - Hochschulschrift
KW - Hochfrequenzplasma
KW - Plasmarandschicht
KW - Plasmadynamik
KW - Atomemissionsspektroskopie
PY - 2009
UR - http://slubdd.de/katalog?TN_libero_mab2
ER -