TY - GEN
AU - Diekmann, Leonard Frank
AU - Kassner, Alexander
AU - Dencker, Folke
AU - Wurz, Marc Christopher
TI - Nonevaporable getter-MEMS for generating UHV conditions in small volumina
ET - published Version
PB - AIP Publishing
SN - 2166-2746
KW - Getters
KW - High-vacuum chambers
KW - Condition
KW - Ultrahigh vacuum
KW - Control electronics
PY - 2022
N2 - Diese Datenquelle enthält auch Bestandsnachweise, die nicht zu einem Volltext führen.
BT - Journal of vacuum science & technology : JVST : B, Nanotechnology & microelectronics : materials, processing, measurement, & phenomena 40 (2022), Nr. 5 ; Journal of vacuum science & technology : JVST : B, Nanotechnology & microelectronics : materials, processing, measurement, & phenomena
CY - New York, NY
UR - http://slubdd.de/katalog?TN_libero_mab2
ER -
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