TY - GEN
AU - Theeuwes, Roel J.
AU - Melskens, Jimmy
AU - Beyer, Wolfhard
AU - Breuer, Uwe
AU - Gutjahr, Astrid
AU - Mewe, Agnes A.
AU - Macco, Bart
AU - Kessels, Wilhelmus M. M.
TI - Hydrogenation of p+ poly-Si by Al2O3 nanolayers prepared by atomic layer deposition
PB - AIP Publishing
SN - 0021-8979
SN - 1089-7550
KW - General Physics and Astronomy
PY - 2023
UR - http://slubdd.de/katalog?TN_libero_mab2
ER -
Download citation