TY - GEN
AU - Fillot, F.
AU - Maîtrejean, S.
AU - Matko, I.
AU - Chenevier, B.
TI - Experimental study of the minimum metal gate thickness required to fix the effective work function in metal-oxide-semiconductor capacitors
PB - AIP Publishing
SN - 0003-6951
SN - 1077-3118
KW - Physics and Astronomy (miscellaneous)
PY - 2008
UR - http://slubdd.de/katalog?TN_libero_mab2
ER -
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