TY - GEN
AU - Kühne, H.
AU - Gaworzewski, P.
AU - Malze, W.
TI - Autodoping of epitaxial silicon layers (II) diffusion‐induced autodoping
PB - Wiley
SN - 0232-1300
SN - 1521-4079
KW - Condensed Matter Physics
KW - General Materials Science
KW - General Chemistry
PY - 1985
UR - http://slubdd.de/katalog?TN_libero_mab2
ER -
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