TY - GEN
AU - Hotz, Hendrik
AU - Schmidt, Hennrik
AU - Lorenz, Dominik
AU - Scherer, Thomas
AU - Linke, Christian
AU - Koestenbauer, Harald
AU - Winkler, Joerg
TI - 41.3: Invited Paper: Molybdenum Titanium based Sputter Targets for TFT Application
PB - Wiley
SN - 0097-966X
SN - 2168-0159
KW - Applied Mathematics
KW - General Mathematics
PY - 2022
UR - http://slubdd.de/katalog?TN_libero_mab2
ER -
Download citation