TY - GEN
AU - Kroesen, G. M. W.
AU - Hoog, F. J.
TI - In-situ diagnostics for plasma surface processing
PB - Springer Science and Business Media LLC
SN - 0721-7250
SN - 1432-0630
KW - General Materials Science
KW - General Chemistry
KW - Physics and Astronomy (miscellaneous)
KW - General Engineering
KW - General Materials Science
PY - 1993
UR - http://slubdd.de/katalog?TN_libero_mab2
ER -
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