TY - GEN
AU - Basu, Nandita
AU - Bhat, K.N.
TI - High pressure oxidation of Si(100) for production of ultrathin oxide metal-insulator-semiconductor diodes
PB - Elsevier BV
SN - 0040-6090
KW - Materials Chemistry
KW - Metals and Alloys
KW - Surfaces, Coatings and Films
KW - Surfaces and Interfaces
KW - Electronic, Optical and Magnetic Materials
PY - 1988
UR - http://slubdd.de/katalog?TN_libero_mab2
ER -
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