TY - GEN
AU - Sobe, Gerhard
AU - Neelmeijer, Antje
AU - Weise, Günter
AU - Heinrich, Armin
TI - Process characterization with d.c. magnetron sputtering of CrSiC thin films in ArCH4 mixtures
PB - Elsevier BV
SN - 0040-6090
KW - Materials Chemistry
KW - Metals and Alloys
KW - Surfaces, Coatings and Films
KW - Surfaces and Interfaces
KW - Electronic, Optical and Magnetic Materials
PY - 1991
UR - http://slubdd.de/katalog?TN_libero_mab2
ER -
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