TY - GEN
AU - Strusny, H.
AU - Ressel, P.
AU - Vogel, K.
AU - Würfl, J.
TI - He implant-damage isolation of MOVPE grown GaAs/InGaP/InGaAsP layers
PB - Elsevier BV
SN - 0168-583X
KW - Instrumentation
KW - Nuclear and High Energy Physics
PY - 1996
UR - http://slubdd.de/katalog?TN_libero_mab2
ER -
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