TY - GEN
AU - De Bosscher, W.
AU - Matilainen, M.
AU - Witvrouw, A.
AU - Maex, K.
TI - Influence of temperature on the properties of sputtered AlSiCu films
PB - Elsevier BV
SN - 0169-4332
KW - Surfaces, Coatings and Films
KW - Condensed Matter Physics
KW - Surfaces and Interfaces
KW - General Physics and Astronomy
KW - General Chemistry
PY - 1993
UR - http://slubdd.de/katalog?TN_libero_mab2
ER -
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