TY - GEN
AU - Bergmair, Iris
AU - Mühlberger, Michael
AU - Gusenbauer, Markus
AU - Schöftner, Rainer
AU - Hingerl, Kurt
TI - Equalising stamp and substrate deformations in solid parallel-plate UV-based nanoimprint lithography
PB - Elsevier BV
SN - 0167-9317
KW - Electrical and Electronic Engineering
KW - Surfaces, Coatings and Films
KW - Condensed Matter Physics
KW - Atomic and Molecular Physics, and Optics
KW - Electronic, Optical and Magnetic Materials
PY - 2008
UR - http://slubdd.de/katalog?TN_libero_mab2
ER -
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