TY - GEN
AU - Lorenz, Pierre
AU - Ehrhardt, Martin
AU - Wehrmann, Anja
AU - Zimmer, Klaus
TI - Laser-induced front side etching of fused silica with XeF excimer laser using thin metal layers
PB - Elsevier BV
SN - 0169-4332
KW - Surfaces, Coatings and Films
KW - Condensed Matter Physics
KW - Surfaces and Interfaces
KW - General Physics and Astronomy
KW - General Chemistry
PY - 2012
UR - http://slubdd.de/katalog?TN_libero_mab2
ER -
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