TY - GEN
AU - Geipel, Torsten
AU - Kumm, Julia
AU - Moeller, Monja
AU - Kroely, Laurent
AU - Kraft, Achim
AU - Eitner, Ulrich
AU - Wolf, Andreas
AU - Zhang, Zhenhao
AU - Wohlfahrt, Peter
TI - Low-temperature Interconnection of PVD-Aluminium Metallization
PB - Elsevier BV
SN - 1876-6102
KW - General Earth and Planetary Sciences
KW - General Environmental Science
PY - 2016
UR - http://slubdd.de/katalog?TN_libero_mab2
ER -
Download citation