TY - GEN

AU - Zheng, Haiwu

AU - Fu, Zhuxi

AU - Lin, Bixia

AU - Li, Xiaoguang

TI - Controlled-growth and characterization of 3C-SiC and 6H-SiC films on C-plane sapphire substrates by LPCVD

PB - Elsevier BV

SN - 0925-8388

PY - 2006

ER -