TY -
GEN
AU - Storbeck, Olaf
TI -
Evolution of Structural and Electrical Properties of Plasma Nitrided Silicon Oxynitrides During the Formation Process
PB - The Electrochemical Society
SN - 2151-2043
KW - General Medicine
PY - 2006
UR - http://slubdd.de/katalog?TN_libero_mab2
ER -