TY - GEN
AU - Fukui, Satoshi
AU - Kazama, Kyosuke
AU - Sekiya, Syouta
AU - Ogawa, Jun
AU - Oka, Tetsuo
AU - Sato, Takao
AU - Sorimachi, Satoshi
AU - Saito, Kimiyo
AU - Miyazaki, Shinsuke
TI - Research and Development of Non-Contact Spin Processor for Clean Process in Semiconductor-Related-Production System by Applying HTS Magnetic Levitation
PB - Institute of Electrical and Electronics Engineers (IEEE)
SN - 1051-8223
SN - 1558-2515
KW - Electrical and Electronic Engineering
KW - Condensed Matter Physics
KW - Electronic, Optical and Magnetic Materials
PY - 2010
UR - http://slubdd.de/katalog?TN_libero_mab2
ER -
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