TY - GEN
AU - Lin, Qinghuang
AU - Zhang, Ying
AU - Oehrlein, Gottlieb S.
TI - Special Section Guest Editorial: Advanced Plasma-Etch Technology
PB - SPIE-Intl Soc Optical Eng
SN - 1932-5150
KW - Electrical and Electronic Engineering
KW - Mechanical Engineering
KW - Condensed Matter Physics
KW - Atomic and Molecular Physics, and Optics
KW - Electronic, Optical and Magnetic Materials
PY - 2013
UR - http://slubdd.de/katalog?TN_libero_mab2
ER -
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