TY - GEN
AU - Petrova, E. V.
AU - Gol’denberg, B. G.
AU - Kondrat’ev, V. I.
AU - Mezentseva, L. A.
AU - Pindyurin, V. F.
AU - Gentselev, A. N.
AU - Eliseev, V. S.
AU - Lyakh, V. V.
TI - Fabrication of x-ray masks on a thick substrate for deep x-ray lithography
PB - Pleiades Publishing Ltd
SN - 1027-4510
SN - 1819-7094
KW - Surfaces, Coatings and Films
PY - 2007
UR - http://slubdd.de/katalog?TN_libero_mab2
ER -
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