TY - GEN
AU - Urbach, H. Paul
AU - Bernard, Douglas A.
TI - Modeling latent-image formation in photolithography, using the Helmholtz equation
PB - Optica Publishing Group
SN - 1520-8532
SN - 1084-7529
KW - Computer Vision and Pattern Recognition
KW - Atomic and Molecular Physics, and Optics
KW - Electronic, Optical and Magnetic Materials
PY - 1989
UR - http://slubdd.de/katalog?TN_libero_mab2
ER -
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