TY
-
GEN
AU
-
Sha, Jin
AU
-
Yao, Zhi Yuan
AU
-
Jiao, Yang
TI
-
An Ultrasonic Knife System for MEMS Packaging
PB
-
Trans Tech Publications, Ltd.
SN
-
1662-7482
KW
-
General Engineering
PY
-
2012
UR
-
http://slubdd.de/katalog?TN_libero_mab2
ER
-
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