TY - GEN
AU - Sha, Jin
AU - Yao, Zhi Yuan
AU - Jiao, Yang
TI - An Ultrasonic Knife System for MEMS Packaging
PB - Trans Tech Publications, Ltd.
SN - 1662-7482
KW - General Engineering
PY - 2012
UR - http://slubdd.de/katalog?TN_libero_mab2
ER -
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