TY - GEN
AU - Ahner, Nicole
AU - Zimmermann, Sven
AU - Köhler, Nicole
AU - Krüger, Stephan
AU - Schulz, Stefan E.
TI - Wetting Behavior of Plasma Etch Residue Removal Solutions on Plasma Damaged and Repaired Porous ULK Dielectrics
PB - Trans Tech Publications, Ltd.
SN - 1662-9779
KW - Condensed Matter Physics
KW - General Materials Science
KW - Atomic and Molecular Physics, and Optics
PY - 2014
ER -
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