TY - GEN
AU - Job, Reinhart
AU - Fahrner, Wolfgang R.
AU - Ulyashin, Alexander G.
AU - Bumay, Yu.A.
AU - Ivanov, A.I.
AU - Palmetshofer, L.
TI - Oxygen Gettering on Buried Layers at Post-Implantation Annealing of Hydrogen Implanted Czochralski Silicon
PB - Trans Tech Publications, Ltd.
SN - 1662-9779
KW - Condensed Matter Physics
KW - General Materials Science
KW - Atomic and Molecular Physics, and Optics
PY - 1997
UR - http://slubdd.de/katalog?TN_libero_mab2
ER -
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