@misc {TN_libero_mab2,
author = { Bichra, Mohamed AND Meinecke, Thomas AND Müller, Lutz AND Feßer, Patrick AND Hoffmann, Martin AND Sinzinger, Stefan },
title = { Innovative freeform measurement method using two dimensional binary diffractive grating based on nanostructured silicon },
publisher = {},
year = {[2017]},
address = { },
}
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