author = { Micro-Optics and MOEMS Veranstaltung 2018 Peking AND Zhong guo guang xue gong cheng xue hui AND Zhongguo-Yuhang-Xuehui Guangdian-Jishu-Zhuanye-Weiyuanhui AND SPIE AND SPIE Wang, Yuelin AND Xie, Huikai },

title = { Micro-Optics and MOEMS 22-24 May 2018, Beijing, China },

publisher = {SPIE},

isbn = {9781510623392},

keywords = { Konferenzschrift , MEMS , Mikrooptik },

year = {[2018]},

abstract = {Teilkonferenz des International Symposium on Optoelectronic Technology and Application (OTA 2018)},

abstract = {Literaturangaben},

booktitle = {Proceedings of SPIE ; volume 10848},

address = { Bellingham, Washington, USA },

url = { http://slubdd.de/katalog?TN_libero_mab2 }