@book
{TN_libero_mab2,
author = {
Krimmel, Eberhard F.
},
title = {
Gmelin handbook of inorganic and organometallic chemistry
system number 15
Si, Silicon Suppl.Vol. B5c Silicon nitride in microelectronics and solar cells / authors: Chapters 1 to 31 in coop. with Eberhard F. Krimmel ...
},
edition = {
8. ed.
}
,
publisher = {Springer},
isbn = {3540936300},
isbn = {0387936300},
year = {1991},
address = {
Berlin
},
url = {
http://slubdd.de/katalog?TN_libero_mab2
}
}