author = { International Symposium on Semiconductor Wafer Bonding: Science, Technology, and Applications 1 1991 Phoenix, Ariz AND Electrochemical Society Electronics Division AND Electrochemical Society Dielectric Science and Technology Division AND Electrochemical Society Gösele, Ulrich },

title = { Proceedings of the First International Symposium on Semiconductor Wafer Bonding: Science, Technology, and Applications [held at the Phoenix, AZ, Meeting of the Electrochemical Society, October 13-18, 1991] },

publisher = {Electrochemical Society},

isbn = {1566770084},

keywords = { Semiconductor wafers Congresses , Semiconductors , Bonding , Congresses , Semiconductor , Konferenzschrift 1991 Phoenix, Ariz. , Wafer , Bonden },

year = {1992},

abstract = {Includes bibliographical references and indexes},

booktitle = {Proceedings / Electrochemical Society ; 92,7 ; Electronics and dielectric science and technology divisions},

address = { Pennington, NJ },

url = { http://slubdd.de/katalog?TN_libero_mab2 }