author = { Maluf, Nadim AND Williams, Kirt },

title = { An introduction to microelectromechanical systems engineering },

edition = { 2. ed. } ,

publisher = {Artech House},

isbn = {1580535909},

isbn = {9781580535908},

keywords = { Microelectromechanical systems , MEMS , Mikromechanik , Mikrosystemtechnik },

year = {2004},

abstract = {Includes bibliographical references and index},

booktitle = {Microelectromechanical systems series},

address = { Boston, Mass. [u.a.] },

url = { http://slubdd.de/katalog?TN_libero_mab2 }