@book
{TN_libero_mab2,
author = {
Eranna, Golla
},
title = {
Crystal growth and evaluation of silicon for VLSI and ULSI
},
edition = {
First issued in paperback
}
,
publisher = {CRC Press},
isbn = {9781138034198},
isbn = {9781482232813},
year = {2016},
address = {
Boca Raton
},
url = {
http://slubdd.de/katalog?TN_libero_mab2
}
}