author = { Fahrner, Wolfgang },

title = { Nanotechnologie und Nanoprozesse Einführung und Bewertung },

edition = { 2. Aufl. 2017 } ,

publisher = {Springer Vieweg},

isbn = {9783662489086},

keywords = { Engineering , Inorganic chemistry , Electronics , Microelectronics , Optical materials , Electronic materials , Nanotechnology , Nanotechnologie , Nanoelektronik },

year = {2017},

booktitle = {SpringerLink ; Bücher},

address = { Berlin, Heidelberg },

url = { http://slubdd.de/katalog?TN_libero_mab2 }