author = { Laser-Based Micro- and Nanoprocessing Veranstaltung 2016 San Francisco, Calif AND SPIE AND SPIE Klotzbach, Udo AND Washio, Kunihiko AND Arnold, Craig B. },

title = { Laser-Based Micro- and Nanoprocessing X 16-18 February 2016, San Francisco, California, United States },

publisher = {SPIE},

keywords = { Konferenzschrift },

year = {[2016]},

abstract = {Literaturangaben},

abstract = {Teilkonferenz von: SPIE Photonics West (innerhalb der Teil-Konferenz: SPIE LASE)},

booktitle = {Proceedings of SPIE ; volume 9736},

address = { Bellingham, Washington },

url = { http://slubdd.de/katalog?TN_libero_mab2 }