@misc
{TN_libero_mab2,
author = {
Güttler, Dominik
},
title = {
An investigation of target poisoning during reactive magnetron sputtering
},
publisher = {Dresden : Forschungszentrum Dresden-Rossendorf},
year = {2009},
address = {
[Erscheinungsort nicht ermittelbar]
},
url = {
http://slubdd.de/katalog?TN_libero_mab2
}
}