@book
{TN_libero_mab2,
author = {
Suntola, Tuomo
},
title = {
Atomic layer epitaxy
},
edition = {
1. publ.
}
,
publisher = {Chapman and Hall},
publisher = {: Blackie [u.a.]},
isbn = {0216925746},
isbn = {0412020114},
keywords = {
Semiconductor devices. Atomic layer epitaxy
,
Atomschichtepitaxie
},
year = {1990},
year = {, 1990},
address = {
New York
,
; Glasgow [u.a.]
},
url = {
http://slubdd.de/katalog?TN_libero_mab2
}
}