author = { Lange, Dirk AND Brand, Oliver AND Baltes, Henry },

title = { CMOS cantilever sensor systems atomic force microscopy and gas sensing applications },

publisher = {Springer},

isbn = {3540431438},

keywords = { Microelectromechanical systems Design and construction , Metal oxide semiconductors, Complementary Design and construction , Levers Design and construction , Atomic force microscopy Equipment and supplies Design and construction , Gas detectors Design and construction , Sensorsystem , CMOS , Rasterkraftmikroskopie , Gassensor },

year = {2002},

abstract = {Literaturverz. S. [131] - 140},

booktitle = {Microtechnology and MEMS},

booktitle = {Physics and astronomy online library},

address = { Berlin },

url = { http://slubdd.de/katalog?TN_libero_mab2 }