@misc
{TN_libero_mab2,
author = {
},
title = {
Aktuelle Berichte aus der Mikrosystemtechnik
= Recent developments in MEMS
},
publisher = {Shaker Verlag},
publisher = {: Shaker},
isbn = {1862-5711},
keywords = {
Monografische Reihe
},
year = {2006-},
year = {, früher},
address = {
Düren
,
; Aachen
},
url = {
http://slubdd.de/katalog?TN_libero_mab2
}
}