author = { IEEE Workshop on Micro Electro Mechanical Systems (1994 :Ōiso-machi, Japan) AND American Society of Mechanical Engineers Dynamic Systems and Control Division AND IEEE Robotics and Automation Society AND Micromachine Center (Japan) },

title = { IEEE micro electro mechanical systems an investigations [sic] of micro structures, sensors, actuators, machines, and robotic systems : proceedings, Oiso, Japan, January 25-28, 1994 },

publisher = {[Institute of Electrical and Electronics Engineers]},

isbn = {0780318358},

isbn = {078031834X},

isbn = {0780318331},

isbn = {9780780318359},

isbn = {9780780318342},

isbn = {9780780318335},

keywords = { Electromechanical devices Congresses , Detectors Congresses , Microelectronics Congresses , Actuators Congresses , Konferenzschrift },

year = {2011},

abstract = {Includes bibliographical references and index},

abstract = {Use copy Restrictions unspecified star MiAaHDL},

address = { [New York] },

url = { http://slubdd.de/katalog?TN_libero_mab2 }