@misc
{TN_libero_mab2,
author = {
Gross, Hermann
AND
Henn, Mark-Alexander
AND
Heidenreich, Sebastian
AND
Rathsfeld, Andreas
AND
Bär, Markus
},
title = {
Modeling of line roughness and its impact on the diffraction intensities and the reconstructed critical dimensions in scatterometry
},
edition = {
published Version
}
,
publisher = {Weierstraß-Institut für Angewandte Analysis und Stochastik},
isbn = {0946-8633},
isbn = {0946-8633},
keywords = {
Diffraction gratings
,
metrology
},
year = {2012},
abstract = {Diese Datenquelle enthält auch Bestandsnachweise, die nicht zu einem Volltext führen.},
address = {
Berlin
},
url = {
http://slubdd.de/katalog?TN_libero_mab2
}
}