author = { Dudek, Piotr Schmeisser, Dieter },

title = { Atomic scale engineering of HfO2–based dielectrics for future DRAM applications },

publisher = {Universitätsbibliothek der BTU Cottbus},

keywords = { Mikroelektronik ; Miniaturisierung ; Dielektrikum ; Elektrode ; Metall , Hochschulschrift },

year = {2011},

address = { Cottbus },

url = { http://slubdd.de/katalog?TN_libero_mab2 }