author = { Tittmann-Otto, Jana Schulz, Stefan E. AND Tegenkamp, Christoph AND Hermann, Sascha },

title = { Improvement of carbon nanotube-based field-effect transistors by cleaning and passivation },

publisher = {Technische Universität Chemnitz},

keywords = { Carbon , Field-effect transistors , Nanoelektronik , Kohlenstoff-Nanoröhre , CNTFET , Passivierung , Reinigung , Feldeffekttransistor , Kontamination , Chemische Reinigung , Hysterese , Carbon Nanotube , Field-effect transistor , Dielectrophoresis , Transfer characteristics , Hysteresis , Surfactant , Process contamination , Plasma cleaning , Passivation , Kohlenstoffnanoröhren , Feld-Effekt Transistoren , Dielektrophorese , Transferkennlinie , Tenside , prozessinduzierte Kontaminationen , plasmaunterstützte Reinigung },

year = {2020},

address = { Chemnitz },

url = { http://slubdd.de/katalog?TN_libero_mab2 }