author = { Schwizer, Jürg AND Mayer, Michael AND Brand, Oliver },

title = { Force Sensors for Microelectronic Packaging Applications },

publisher = {Springer Berlin Heidelberg},

isbn = {9783540269458},

keywords = { System safety , Electronics , Optical materials , Nanotechnology , Chemistry , Microelectronic packaging , Prozessüberwachung , Kraftsensor , Drahtbonden , Flip-Chip-Technologie },

year = {2005},

booktitle = {Microtechnology and MEMS},

booktitle = {SpringerLink ; Bücher},

address = { Berlin, Heidelberg },

url = { http://slubdd.de/katalog?TN_libero_mab2 }