author = { Drüsedau, Tilo P. AND Bläsing, Jürgen AND Gnaser, Hubert },

title = { Aluminum mediated low temperature growth of crystalline silicon by plasma-enhanced chemical vapor and sputter deposition },

publisher = {AIP Publishing},

isbn = {0003-6951},

isbn = {1077-3118},

keywords = { Physics and Astronomy (miscellaneous) },

year = {1998},

url = { http://slubdd.de/katalog?TN_libero_mab2 }