author = { Leone, Stefano AND Ligl, Jana AND Manz, Christian AND Kirste, Lutz AND Fuchs, Theodor AND Menner, Hanspeter AND Prescher, Mario AND Wiegert, Joachim AND Žukauskaitė, Agnė AND Quay, Ruediger AND Ambacher, Oliver },

title = { Metal‐Organic Chemical Vapor Deposition of Aluminum Scandium Nitride },

publisher = {Wiley},

isbn = {1862-6270},

isbn = {1862-6254},

year = {2020},

url = { http://slubdd.de/katalog?TN_libero_mab2 }