author = { Kroesen, G. M. W. AND Hoog, F. J. },

title = { In-situ diagnostics for plasma surface processing },

publisher = {Springer Science and Business Media LLC},

isbn = {0721-7250},

isbn = {1432-0630},

keywords = { General Materials Science , General Chemistry , Physics and Astronomy (miscellaneous) , General Engineering , General Materials Science },

year = {1993},

url = { http://slubdd.de/katalog?TN_libero_mab2 }